美國ASTM D5127電子及半導(dǎo)體工業(yè)用純水水質(zhì)要求
美國ASTM D5127電子及半導(dǎo)體工業(yè)用純水水質(zhì)要求
|
項目 |
TypeE-1 |
TypeE-1．1 |
TypeE-1.2 |
TyPeE-2 |
TyPeE-3 |
TyPeE-4 |
|
線寬(μm) |
1.0-0.5 |
0.5-0.25 |
0.25-0.18 |
5-1 |
>5 |
- |
|
電阻率 |
18.2 |
18.2 |
18.2 |
17.5 |
12 |
0.5 |
|
熱源(EU/ml) |
0.03 |
0.03 |
0.03 |
0.25 |
- |
- |
|
TOC(μg／L) |
5 |
2 |
1 |
50 |
300 |
1000 |
|
溶解氧DO(μg／L) |
1 |
1 |
1 |
- |
- |
- |
|
蒸發(fā)殘渣(μg／L) |
1 |
0.5 |
0.1 |
- |
- |
- |
|
微粒(μm)(SEM檢測) |
|
|
|
|
|
|
|
0.1—0.2 |
1000 |
1000 |
200 |
|
|
|
|
0.2—0.5 |
500 |
500 |
l00 |
3000 |
|
|
|
0.5—1.0 |
50 |
50 |
1 |
|
10000 |
|
|
10 |
- |
- |
- |
|
|
100000 |
|
微粒(μm)(在線檢測) |
|
|
|
|
|
|
|
0.05—0.1 |
500 |
500 |
100 |
|
|
|
|
0.1—0.2 |
300 |
300 |
50 |
|
|
|
|
0.2—0.3 |
50 |
50 |
20 |
|
|
|
|
0.3—0.5 |
20 |
20 |
10 |
|
|
|
|
＞0.5 |
4 |
4 |
1 |
|
|
|
|
細(xì)菌 |
|
|
|
|
|
|
|
100ml Sample |
1 |
1 |
1 |
|
|
|
|
1L Sample |
1 |
1 |
0.1 |
10 |
10000 |
100000 |
|
硅(μm) |
|
|
|
|
|
|
|
總硅 |
3 |
0.5 |
0.5 |
10 |
50 |
1000 |
|
溶解硅 |
1 |
0.1 |
0.05 |
|
|
|
|
離子(μg／L) |
|
|
|
|
|
|
|
NH4 |
0.1 |
0.1 |
0.05 |
- |
- |
|
|
Br |
0.1 |
0.05 |
0.02 |
- |
- |
|
|
Cl |
0.l |
0.05 |
0.02 |
1 |
10 |
1000 |
|
F |
0.1 |
0.05 |
0.03 |
- |
- |
- |
|
N03 |
0.1 |
0.05 |
0.02 |
1 |
5 |
500 |
|
N02 |
0.l |
0.05 |
0.02 |
- |
- |
- |
|
P04 |
0.1 |
0.05 |
0.02 |
1 |
5 |
500 |
|
S04 |
0.1 |
0.05 |
0.02 |
1 |
5 |
500 |
|
Al |
0.05 |
0.02 |
0.005 |
- |
- |
- |
|
Ba |
0.05 |
0.02 |
0.001 |
- |
- |
- |
|
B |
0.05 |
0.02 |
0.005 |
- |
- |
- |
|
Ca |
0.05 |
0.02 |
0.002 |
- |
- |
- |
|
Cr |
0.05 |
0.02 |
0.002 |
- |
- |
- |
|
Cu |
0.05 |
0.02 |
0.002 |
1 |
2 |
500 |
|
Fe |
0.05 |
0.02 |
0.002 |
- |
- |
- |
|
Pb |
0.05 |
0.02 |
0.005 |
- |
- |
- |
|
Li |
0.05 |
0.02 |
0.003 |
- |
- |
- |
|
Mg |
0.05 |
0.02 |
0.002 |
- |
- |
- |
|
Mn |
0.05 |
0.02 |
0.002 |
- |
- |
- |
|
K |
0.05 |
0.02 |
0.002 |
1 |
2 |
500 |
|
K |
0.05 |
0.02 |
0.005 |
2 |
5 |
500 |
|
Na |
0.05 |
0.02 |
0.005 |
1 |
5 |
1000 |
|
Sr |
0.05 |
0.02 |
0.00l |
- |
- |
- |
|
zi |
0.05 |
0.02 |
0.002 |
1 |
5 |
500 |
蘭州去離子水設(shè)備，蘭州水處理設(shè)備，超純水設(shè)備，醫(yī)用GMP純化水設(shè)備。銀川純水設(shè)備 純水設(shè)備
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